Mitutoyo FS70 Standard Microscope Body for Semiconductor Inspection, Brightfield

Brand: Mitutoyo Microscopes
Product Code: MIT378-184-1
Simple SKU:  MIT378-184-1

Your Price $5,875.00

Model *

Turret *

Objectives *

Optional Stand

Optional Illumination

Product Description


  • Erect Image Trinocular (50/50, 100/100), Erect Image Tilting Trinocular (50/50)
  • Mitutoyo Infinity Corrected Optics
  • Siedentopf Design Trinocular Body Tube
  • Widefield (FN=24) 10x Eyepieces
  • FS70 – Main Body (Non-Laser) with 1x tube lens
  • Brightfield Objective Magnification Selections from 1x to 200x
  • Extra Long Working Distance Plan Apochromat Objectives
  • Differential Interference Contrast (DIC) Option for Nonlaser Configurations
  • Reverse 4x Nosepiece
  • Optional Motorized 4x Centerable Nosepiece
  • Six-foot Cable Remote Intensity Control for Fiber Optic Illuminator
  • Concentric Coarse and Fine Focus -0.1mm Rev /Fine Focus
  • Manual Focus Block
Part #
Short Base Model
Part #
Focus adjustment 50mm travel range with concentric coarse (3.8mm/rev) and fine (0.1mm/rev) focusing wheels (right / left)
Image Erect image
Pupil distance Siedentopf type, adjustment range: 2 – 3" / 51 – 76mm
Field number 24
Tilt angle 0° – 20°
Optical pass ratio 50/50 100/0 or 0/100
Protective filter
Tube lens 1x
Applicable laser
Camera mount C-mount
Illumination system, optional Reflective illumination for bright field (Koehler illumination, with aperture diaphragm)
12V 100W fiber optics, non-stepped adjustment, light guide length: 1.5m, power consumption 150W
Objective, optional
(for observation)
M Plan Apo, M Plan Apo SL, G Plan Apo
Objective, optional
(for laser-cutting)
Loading weight* 32lbs / 14.5kg 30lbs / 13.6kg
Mass (main unit) 13lbs / 6.1kg 15.5lbs / 7.1kg

*Loading weight on optical tube excluding weight of objective lenses and eyepieces.

Turret Choices:

Supported observation Bright field (M Plan Apo/G Plan Apo)
Model No. 378-018 378-016A 378-216A
Driving method Manual Electric
Objective positions 4 5

Objective Choices:

M Plan Apo Objectives
Compatible observation method: Bright-field observation, simple polarized observation, differential interference observation
Advantage: Plan apochromat lenses free of spherical aberration/chromatic aberration are adopted to obtain images with excellent color reproducibility without blur over the entire field of view.

M Plan Apochromat Brightfield Objectives
Model No. Magnification N.A. W.D. Focal distance Resolving power Focal depth View field
with eyepiece
View field with
CCD camera
378-800-3 1X 0.025 11.0mm 200mm 11.0μm 440μm ø24mm 4.8 x 6.4mm
378-801-6 2X 0.055 34.0mm 100mm 5.0μm 91μm ø12mm 2.4 x 3.2mm
378-802-6 5X 0.14 34.0mm 40mm 2.0μm 14.0μm ø4.8mm 0.96 x 1.28mm
378-807-3 7.5X 0.21 35.0mm 26.67mm 1.3μm 6.2μm ø3.6mm 0.64 x 0.85mm
378-803-3 10X 0.28 34.0mm 20mm 1.0μm 3.5μm ø2.4mm 0.48 x 0.64mm
378-804-3 20X 0.42 20.0mm 10mm 0.7μm 1.6μm ø1.2mm 0.24 x 0.32mm
378-805-3 50X 0.55 13.0mm 4mm 0.5μm 0.9μm ø0.48mm 0.10 x 0.13mm
378-806-3 100X 0.70 6.0mm 2mm 0.4μm 0.6μm ø0.24mm 0.05 x 0.06mm
M Plan Apochromat Brightfield Super Long (SL) Working Distance Objectives
378-810-3 20X 0.28 30.5mm 10mm 1.0μm 3.5μm ø1.2mm 0.24 x 0.32mm
378-811-3 50X 0.42 20.5mm 4mm 0.7μm 1.6μm ø0.48mm 0.10 x 0.13mm
378-812-3 80X 0.50 15.0mm 2.5mm 0.6μm 1.1μm ø0.3mm 0.06 x 0.08mm
378-813-3 100X 0.55 13.0mm 2mm 0.5μm 0.9μm ø0.24mm 0.05 x 0.06mm
378-816-3 200X 0.62 13.0mm 1mm 0.4μm 0.7μm ø0.12mm 0.025 x 0.03mm
M Plan Apochromat High Resolution (HR) Brightfield Objectives
378-814-4 50X 0.75 5.2mm 4mm 0.4μm 0.49μm ø0.48mm 0.10 x 0.13mm
378-815-4 100X 0.90 1.3mm 2mm 0.3μm 0.34μm ø0.24mm 0.05 x 0.06mm

G Plan Apo Objectives
Compatible observation method: Observation through a cover glass
Advantage: Correction design is performed so as to obtain optimal observation images when observing through the glass. (Corrected on the basis of BK7 and a cover glass thickness of 3.5mm. Custom order of other glass material and thickness is also available.)

G Plan Apochromat Brightfield Objectives with Cover Slip Corrections
Model No. Magnification N.A. W.D. Focal distance Resolving power Focal depth View field
with eyepiece
View field with
CCD camera
378-847 20X 0.28 29.42mm* 10mm 1.0μm 3.5μm ø1.2mm 0.24 x 0.32mm
378-848-3 50X 0.50 13.89mm* 4mm 0.6μm 1.1μm ø0.48mm 0.10 x 0.13mm

* Air conversion

Optional Stand: For mounting the VMU, WIDE VMU, or FS70 microscope unit. Can be combined with an XY stage, stage illumination unit and fiber-optic illuminator to work as a compact microscope for surface observation.

Optional Illumination:
Stage illumination unit (Transmitted): Attaches to the stand to provide contour illumination in conjunction with a fiber-optic illuminator (100W or 150W).
Fiber-optic Illumination Unit (Reflective): 12V 100W Halogen illumination unit or 12V 150W Halogen illumination unit.

Additional Information

Weight 18 lbs
Dimensions 18 x 16 x 14 in


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